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Etching of Silicon Carbide Materials at Elevated Temperatures in a Nitrogen-Based Gas

✍ Scribed by Darryl P. Butt; Richard E. Tressler; Karl E. Spear


Book ID
110825355
Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
386 KB
Volume
74
Category
Article
ISSN
0002-7820

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