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Etching of polyethylene terephthalate thin films by neutral oxygen atoms in the late flowing afterglow of oxygen plasma

โœ Scribed by Alenka Vesel; Metod Kolar; Ales Doliska; Karin Stana-Kleinschek; Miran Mozetic


Book ID
112206885
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
443 KB
Volume
44
Category
Article
ISSN
0142-2421

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