Etching of p- and n-type doped monocrystalline diamond using an ECR oxygen plasma source

✍ Scribed by Bernard, M.; Deneuville, A.; Lagarde, T.; Treboux, E.; Pelletier, J.; Muret, P.; Casanova, N.; Gheeraert, E.

• Book ID: 122572948
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 594 KB
• Volume: 11
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(01)00563-5