Etching of GaAs(100) Surfaces by Halogen Molecules: Density Functional Calculations on the Different Mechanisms

✍ Scribed by Jenichen, Arndt; Engler, Cornelia

• Book ID: 124075965
• Publisher: American Chemical Society
• Year: 2001
• Tongue: English
• Weight: 91 KB
• Volume: 105
• Category: Article
• ISSN: 0022-3654
• DOI: 10.1021/jp002801u