Etching of deep V-groove channels on a (001) InP substrate and regrowth by gas source molecular beam epitaxy

✍ Scribed by A. Lestra; F. Gaborit; E. Gaumont-Goarin; L. Goldstein; D. Lesterlin; Ph. Pagnod-Rossiaux

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 373 KB
• Volume: 167
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(96)00261-8