Etching of chemically vapour deposited amorphous Si3N4-C composites in HF solution: Goto, T. and Hirai, T. Journal of Materials Science Vol 18 No 11 p 3387

• Book ID: 115836599
• Publisher: Elsevier Science
• Year: 1984
• Weight: 142 KB
• Volume: 15
• Category: Article
• ISSN: 0010-4361
• DOI: 10.1016/0010-4361(84)90743-2