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Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

✍ Scribed by L.J Yu; D Sheeja; B.K Tay; Daniel H.C Chua; W.I Milne; J Miao; Y.Q Fu

Book ID: 108417814
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 327 KB
Volume: 195
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(02)00552-4

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