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Etching and Passivation of Silicon in Alkaline Solution: A Coupled Chemical/Electrochemical System

✍ Scribed by Xia, Xinghua; Ashruf, Colin M. A.; French, Patrick J.; Rappich, Joerg; Kelly, John J.

Book ID: 126000510
Publisher: American Chemical Society
Year: 2001
Tongue: English
Weight: 189 KB
Volume: 105
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp003208f

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