✦ LIBER ✦
Etching and film formation in CF3Br plasmas: some qualitative observations and their general implications
- Book ID
- 104265665
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 159 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0042-207X
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✦ Synopsis
Classified abstracts 4619-4629 composition of the oxide film that forms during ambient and low pressure oxidation. The alloy surface is, on the average, enriched in lead. The leadrich phase is preferentially sputtered during ion etching. Tin in the alloy surface oxidizes preferentially; however, if the conditions are such that the alloy surface layer becomes-depleted in tin, lead will be oxidized.