✦ LIBER ✦
Etch Pit Observation for 6H-SiC by Electrochemical Etching Using an Aqueous KOH Solution
✍ Scribed by Kato, Masashi; Ichimura, Masaya; Arai, Eisuke; Ramasamy, Perumalsamy
- Book ID
- 125535110
- Publisher
- The Electrochemical Society
- Year
- 2003
- Tongue
- English
- Weight
- 586 KB
- Volume
- 150
- Category
- Article
- ISSN
- 0013-4651
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