Estimation of fixed charge densities in hafnium-silicate gate dielectrics

✍ Scribed by Kaushik, V.S.; O'Sullivan, B.J.; Pourtois, G.; Van Hoornick, N.; Delabie, A.; Van Elshocht, S.; Deweerd, W.; Schram, T.; Pantisano, L.; Rohr, E.; Ragnarsson, L.-A.; De Gendt, S.; Heyns, M.

• Book ID: 114618458
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 404 KB
• Volume: 53
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2006.882412