Estimation of Excitation Depth Distribution from Electron-excited Auger Spectra of Iron Using Peak Shape Analysis
✍ Scribed by Fujita, D.; Schleberger, M.; Tougaard, S.
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 606 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
We have studied the dependence of the Auger peak shape on primary electron energy for polycrystalline iron and have succeeded in extracting information about the excitation depth distribution. Iron LMM spectra were measured with different incident primary energies (1.25-4.00 keV) and the reflection electron energy-loss spectroscopy (REELS) spectrum was measured at an energy of 0.7 keV corresponding to the average Fe LMM Auger energy. In the inelastic background analysis, we approximated the depth distribution function f ( x ) of emitting atoms as a rectangular or an exponential decay model. Using the inelastic scattering cross-section from REELS, the analysis separated the spectra into the intrinsic Auger spectra and the inelastic peak backgrounds corresponding to thef(x) at each incident energy. It was found that the exponential model was a more suitable model for f ( x ) than the rectangular model. The exponential decay length of excitation for Auger electrons was found to increase significantly as the primary energy increased.