𝔖 Bobbio Scriptorium
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ESCA and SEXAFS investigations of insulating materials for ULSI microelectronics : J. Finster, E-D. Klinkenberg, J. Heeg and W. Braun. Vacuum41(7–9), 1586 (1990)


Book ID
103281618
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
124 KB
Volume
31
Category
Article
ISSN
0026-2714

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