ESCA and SEXAFS investigations of insulating materials for ULSI microelectronics : J. Finster, E-D. Klinkenberg, J. Heeg and W. Braun. Vacuum41(7–9), 1586 (1990)

• Book ID: 103281618
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 124 KB
• Volume: 31
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(91)90165-4