✦ LIBER ✦
Erratum to “On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies” [MR 51/9–11 (2011) 1810–1818]
✍ Scribed by Usama Zaghloul; George Papaioannou; Bharat Bhushan; Fabio Coccetti; Patrick Pons; Robert Plana
- Book ID
- 113800620
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 112 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0026-2714
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