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Erosion of corners and edges on an ion-bombarded silicon surface

✍ Scribed by R. Smith; M. A. Tagg; G. Carter; M. J. Nobes

Publisher: Springer
Year: 1986
Tongue: English
Weight: 341 KB
Volume: 5
Category: Article
ISSN: 0261-8028
DOI: 10.1007/bf01671459

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