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Erosion of a-C:H films deposited on W, Mo, and stainless steel under interaction with air glow discharge

✍ Scribed by R.Kh. Zalavutdinov; A.E. Gorodetsky; V.L. Bukhovets; A.P. Zakharov; I.V. Mazul


Book ID
113731218
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
281 KB
Volume
415
Category
Article
ISSN
0022-3115

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