ERCN* merged nets for modeling degraded behavior and parallel processes in semiconductor manufacturing systems

✍ Scribed by MuDer Jeng; Xiaolan Xie; Sheng-Luen Chung

• Book ID: 117937184
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 323 KB
• Volume: 34
• Category: Article
• ISSN: 1083-4427
• DOI: 10.1109/tsmca.2003.820579