✦ LIBER ✦
Equilibrium thermodynamic analysis of the Si-Ge-Cl-H system for atmospheric and low pressure CVD of Si1-xGex
✍ Scribed by H.P. Tang; L. Vescan; H. Lüth
- Book ID
- 107791929
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 965 KB
- Volume
- 116
- Category
- Article
- ISSN
- 0022-0248
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