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EPR and UV-Raman study of BPSG thin films: structure and defects

✍ Scribed by M. Fanciulli; E. Bonera; E. Carollo; L. Zanotti


Book ID
104305529
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
246 KB
Volume
55
Category
Article
ISSN
0167-9317

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