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Epitaxial ZnO Thin Films for the Application of Ethanol Gas Sensor: Thickness and Al-Doping Effects

✍ Scribed by Kim, Sung-Kyu; Son, Jong-Yeog

Book ID
115523680
Publisher
The Electrochemical Society
Year
2009
Tongue
English
Weight
308 KB
Volume
12
Category
Article
ISSN
1099-0062

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## Abstract The properties of Al‐doped ZnO (AZO) thin films deposited by pulsed DC magnetron sputtering under various target power on polyethylene terephthalate (PET) substrates have been investigated. __In situ__ and real‐time spectroscopic ellipsometry (1.5–6.5 eV) has been employed to study the