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Epitaxial NiSi2 films on Si(100)

✍ Scribed by S. Teichert; W. Bretschneider; H. Helms; G. Beddies; Th. Franke; Chr. Lange

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 646 KB
Volume: 229
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90354-r

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