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Epitaxial-like Y1Ba2Cu3O7−δ superconducting thin films synthesized by plasma enhanced chemical beam deposition techniques

✍ Scribed by B.C. Chung; C.H. Tsai; S.S. Hsu; C.C. Yu; C.H. Lin; I.N. Lin

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
536 KB
Volume
227
Category
Article
ISSN
0921-4534

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A temperature-controlled chemical vapor deposition (TC-CVD) process was developed for in-situ growth of highly c-axis orientated YtBa2Cu30~+x (YBCO) thin films directly on sapphire substrates. This new CVD process, for the first time, uses programmable temperature controllers to optimize and tailor