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Epitaxial Growth of ZnO Films on ZnO-Buffered Al2O3 (0001) in Water at 95°C

✍ Scribed by Jae Young Park; Sun-Woo Choi; Sang Sub Kim


Book ID
109263508
Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
473 KB
Volume
94
Category
Article
ISSN
0002-7820

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Piezoelectric thin films on high acoustic velocity non piezoelectric substrates, such as ZnO and AlN, deposited on diamond or sapphire substrates, are attractive for high frequency and low-loss surface acoustic wave devices. In this work, ZnO films were epitaxialy grown on R-Al 2 O 3 and C-Al 2 O 3