Pulsed Injection MOCVD of YSZ Thin Films
β
G. Garcia; J. Caro; J. Santiso; J.A. Pardo; A. Figueras; A. Abrutis
π
Article
π
2003
π
John Wiley and Sons
π
English
β 484 KB
## Abstract In this work, we describe the preparation of YSZ layers on dense and porous substrates using the pulsed injection metalβorganic (MO) CVD technique. In this technique, the vapor phase is obtained by injecting microβdroplets of a solution, consisting of the required amounts of Zr(tmhd)~4~