Epitaxial growth and electrical measurement of single crystalline Pb(Zr0.52Ti0.48)O3 thin film on Si(001) for micro-electromechanical systems

✍ Scribed by S. Yin; G. Niu; B. Vilquin; B. Gautier; G. Le Rhun; E. Defay; Y. Robach

• Book ID: 113937492
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 669 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.11.073