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Epitaxial 3C-SiC nanocrystal formation at the SiO2/Si interface after carbon implantation and subsequent annealing in CO atmosphere
✍ Scribed by M. Voelskow; B. Pécz; J. Stoemenos; W. Skorupa
- Book ID
- 108224482
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 610 KB
- Volume
- 267
- Category
- Article
- ISSN
- 0168-583X
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