✦ LIBER ✦
EPAS: a generic expert system for advising emitter piloting in IC manufacturing: Y.-K. Yang (Harris Semicond., Melbourne, FL. USA) SOUTH EASTCON '89 Proceedings. Energy and Information Technologies in the Southeast (Cat. No. 89CH2672-4), Columbia, SC, USA, 9–12 April 1989 (New York, NY, USA: IEEE 1989), p. 24–31, vol. 1
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 81 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0026-2692
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