Enhancing life cycles of total pressure vacuum gauges in deposition applications (enhancing life cycles of vacuum gauges)

✍ Scribed by von Freyhold, Nikolas; Gottschalk, Patrick; Bergner, Ute

• Book ID: 118746461
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 568 KB
• Volume: 45
• Category: Article
• ISSN: 0263-2241
• DOI: 10.1016/j.measurement.2011.11.003