Neutron-enhanced annealing of ion-implan
Neutron-enhanced annealing of ion-implantation induced damage in silicon heated by nuclear reactions
β
Kinomura, A.; Yoshiie, T.; Chayahara, A.; Mokuno, Y.; Tsubouchi, N.; Horino, Y.;
π
Article
π
2014
π
Elsevier Science
π
English
β 503 KB