✦ LIBER ✦
Enhancement of the electron-stimulated desorption from amorphous aluminum oxide films on silicon during an increase in the substrate temperature
✍ Scribed by Ivanchenko, M. V.; Gritsenko, V. A.; Nepomnyashchii, A. V.; Saranin, A. A.
- Book ID
- 114992763
- Publisher
- Springer
- Year
- 2012
- Tongue
- English
- Weight
- 279 KB
- Volume
- 57
- Category
- Article
- ISSN
- 1063-7842
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