✦ LIBER ✦
Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
✍ Scribed by Morito Akiyama; Toshihiro Kamohara; Kazuhiko Kano; Akihiko Teshigahara; Yukihiro Takeuchi; Nobuaki Kawahara
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 234 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0935-9648
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