✦ LIBER ✦

Enhancement of MOS gas sensor selectivity by 'on-chip' catalytic filtering

✍ Scribed by Marc A. Portnoff; Richard Grace; Alberto M. Guzman; Paul D. Runco; L.N. Yannopoulos

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 424 KB
Volume: 5
Category: Article
ISSN: 0925-4005
DOI: 10.1016/0925-4005(91)80253-g

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✦ Synopsis

A novel approach to enhancing the selectivity of a thick-film metal-oxide-semiconductor gas sensor is presented. The approach complements the efforts of many investigators who have tried to improve metal-oxide-semiconductor gas sensor selectivity by altering the sensing material alone. The discussion and data presented will focus on how 'on-chip' catalytic filtering is employed to build a selective fuel gas sensor without any adverse effects on the sensor's sensitivity or speed of response. Data are also presented showing the sensor's stable response to methane over an extended concentration range for over three years.

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