✦ LIBER ✦
Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes
✍ Scribed by Nyabero, S. L.; van de Kruijs, R. W. E.; Yakshin, A. E.; Bijkerk, F.
- Book ID
- 121296677
- Publisher
- American Institute of Physics
- Year
- 2013
- Tongue
- English
- Weight
- 651 KB
- Volume
- 103
- Category
- Article
- ISSN
- 0003-6951
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