✦ LIBER ✦
Enhanced thermal stability of a sputtered titanium-nitride film as a diffusion barrier for capacitor-bottom electrodes
✍ Scribed by Dong-Soo Yoon; Jae Sung Roh; Sung-Man Lee; Hong Koo Baik
- Book ID
- 107453068
- Publisher
- Springer US
- Year
- 2003
- Tongue
- English
- Weight
- 636 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0361-5235
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