✦ LIBER ✦
Enhanced stability of platinized silicon substrates using an unconventional adhesion layer deposited by CSD for high temperature dielectric thin film deposition
✍ Scribed by S. Halder; T. Schneller; R. Waser
- Book ID
- 106020426
- Publisher
- Springer
- Year
- 2007
- Tongue
- English
- Weight
- 405 KB
- Volume
- 87
- Category
- Article
- ISSN
- 1432-0630
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