✦ LIBER ✦
Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms
✍ Scribed by Lafleur, T.; Boswell, R. W.; Booth, J. P.
- Book ID
- 111656305
- Publisher
- American Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 862 KB
- Volume
- 100
- Category
- Article
- ISSN
- 0003-6951
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