✦ LIBER ✦
Enhanced performance of an EUV light source (λ = 84 nm) using short-pulse excitation of a windowless dielectric barrier discharge in neon
✍ Scribed by Carman, R J; Kane, D M; Ward, B K
- Book ID
- 115473006
- Publisher
- Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 900 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0022-3727
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