✦ LIBER ✦
Enhanced oxygen reactive ion etching resistance of diazonaphthoquinone-poly(formyloxystyrene) resist system by photoacid catalyzed photo-fries rearrangement and potassium ion treatment in aqueous solution
✍ Scribed by Wen-an Loong; An-na Su
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 302 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
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