✦ LIBER ✦
Enhanced Negative Ion Formation in ArF-Laser-Irradiated Methane: Possible Implications for Plasma Processing Discharges
✍ Scribed by L. A. Pinnaduwage; M. Z. Martin; L. G. Christophorou
- Publisher
- John Wiley and Sons
- Year
- 1995
- Tongue
- English
- Weight
- 417 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0005-8025
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