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Enhanced hot-carrier degradation due to water-related components in TEOS/O3 oxide and water blocking with ECR-SiO2 film
✍ Scribed by Shimoyama, N.; Machida, K.; Takahashi, J.; Murase, K.; Minegishi, K.; Tsuchiya, T.
- Book ID
- 114535227
- Publisher
- IEEE
- Year
- 1993
- Tongue
- English
- Weight
- 566 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0018-9383
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