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Enhanced fatigue characteristics of sol–gel derived PZT thin films

✍ Scribed by Donghyun Shim; Jaemoon Pak; Kuangwoo Nam; Gwangweo Park


Book ID
116600464
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
171 KB
Volume
449
Category
Article
ISSN
0925-8388

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Characteristics of sol-gel derived PZT t
✍ C. Lee; S. Kawano; T. Itoh; T. Suga 📂 Article 📅 1996 🏛 Springer 🌐 English ⚖ 1018 KB

The sol-gel derived PbZr0.53Ti0.4703 (PZT) films were fabricated on the bare Pt/Ti/SiO2/Si substrates or the same substrates coated by the PbTiO3 (PT) interlayers. The post-deposition annealing temperature and time were optimized when the PbO cover layers and PbO vapour-containing atmosphere were co