Enhanced electrical activation of Zn and Be implants in GaAs by the co-implantation of phosphorus : A. C. T. Tang, B. J. Sealy and A. A. Rezazadeh. Vacuum39(11/12), 1061 (1989)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 110 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90673-b