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Enhanced effect of vacuum-deposited SiO2 overlayer on photo-induced hydrophilicity of TiO2 film

✍ Scribed by K. Miyashita; S. Kuroda; T. Ubukata; T. Ozawa; H. Kubota

Book ID
110365680
Publisher
Springer
Year
2001
Tongue
English
Weight
800 KB
Volume
36
Category
Article
ISSN
0022-2461

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## Photo-induced hydrophilic Oxygen flow ratio Self cleaning TiO 2 thin films were deposited by reactive radio frequency magnetron sputtering of Ti target at low working pressure (1 mTorr) and various O 2 and Ar flow ratios (R O2 = O 2 /(O 2 + Ar)). Properties of TiO 2 films were measured by field