[Engineering Materials] Semiconductor-On-Insulator Materials for Nanoelectronics Applications || Engineering Pseudosubstrates with Porous Silicon Technology

✍ Scribed by Nazarov, Alexei; Colinge, J.-P.; Balestra, Francis; Raskin, Jean-Pierre; Gamiz, Francisco; Lysenko, V.S.

• Book ID: 118158502
• Publisher: Springer Berlin Heidelberg
• Year: 2011
• Weight: 1016 KB
• Category: Article
• ISBN: 3642158684
• DOI: 10.1007/978-3-642-15868-1_3