✦ LIBER ✦
Energy transfer from radio frequency sheath accelerated CF+3 and Ar+ ions to a Si wafer
✍ Scribed by Kersten, H.; Snijkers, R. J. M. M.; Schulze, J.; Kroesen, G. M. W.; Deutsch, H.; de Hoog, F. J.
- Book ID
- 126961847
- Publisher
- American Institute of Physics
- Year
- 1994
- Tongue
- English
- Weight
- 513 KB
- Volume
- 64
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.111870
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