Energy spectra of heavy particles bombarding the cathode surface in a dc glow discharge and its effects on low energy implantation

✍ Scribed by Z Wronski; JL Sullivan; SO Saied

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 418 KB
• Volume: 45
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(94)90259-3