This paper presents a new technique using energy filtered TEM (EFTEM) for inelastic electron scattering contrast imaging of Germanium distribution in Si-SiGe nanostructures. Comparing electron energy loss spectra (EELS) obtained in both SiGe and Si single crystals, we found a spectrum area strongly
✦ LIBER ✦
Energy-filtered electron microscopy for imaging core–shell nanostructures
✍ Scribed by Cyril T. Langlois; Tetsuo Oikawa; Pascale Bayle-Guillemaud; Christian Ricolleau
- Book ID
- 106477068
- Publisher
- Springer Netherlands
- Year
- 2007
- Tongue
- English
- Weight
- 586 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1388-0764
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