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Energy distributions of Ga+ and In+ secondary ions sputtered from AIIIBV compound semiconductors by noble gas ions: Mass-dependence of the high-energy yield on the second component (P, As, Sb) of the compounds

✍ Scribed by A. Tolstogouzov; S. Daolio; C. Pagura; C.L. Greenwood; D.S. Karpuzov; N.S. McIntyre


Book ID
114166807
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
134 KB
Volume
203
Category
Article
ISSN
0168-583X

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