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Energy distribution of electronically excited molecules produced by ion bombardment of silicon

✍ Scribed by R. Walkup; Ph. Avouris

Publisher: Elsevier Science
Year: 1985
Weight: 52 KB
Volume: 157
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(85)91085-0

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