Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna

✍ Scribed by Charles, C.; Boswell, R. W.; Lieberman, M. A.

• Book ID: 120085908
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 346 KB
• Volume: 10
• Category: Article
• ISSN: 1070-664X
• DOI: 10.1063/1.1555058